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Device Development Pump Product List

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Development of a pump XLP6000 for a metal ion solution without waste and a pH reagent replenishment device.

A syringe pump that allows for free adjustment of the discharge liquid flow rate in units of 0.3 nl/second and can also monitor the discharge volume.

Fully compatible with semi-additive manufacturing methods, achieving high reproducibility and easy precise flow rate adjustment, realizing CV of 0.05% at a low cost. Flow rate control from the start with a liquid delivery unit that does not depend on external pressure! Volume range for a single delivery: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec to) (※) ※ Depends on the capacity of the installed syringe Example: When a 250μl syringe is installed Volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec to) Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to switch liquid paths and 12-port valves can be installed.

  • dispenser
  • Syringe Pump
  • Positive Displacement Pump
  • Device Development Pump

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Development of a device requiring titration function with pump XLP6000.

Syringe pump for adjusting the discharge volume from 1nl and monitoring the discharge volume.

Significant achievements in semiconductor manufacturing and plating solution management devices. High reproducibility and easy precise flow rate adjustment, achieving CV of 0.05% at a low cost. Optimizing flow rate and flow volume based on solution material is extremely simple! Liquid volume range for a single delivery: 1nl to 50ml Liquid volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec to) (※) ※ Depends on the capacity of the syringe installed Example: When a 250μl syringe is installed Liquid volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec to) Example: When a 10ml syringe is installed Liquid volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices. Contributes to a decrease in the failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to 12-port valves for liquid path switching can be installed.

  • dispenser
  • Syringe Pump
  • Positive Displacement Pump
  • Device Development Pump

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